Wafer/Large Format VR Plates
Wafer/Large Substrate Vacuum Release Plates (VRLF, VRPLF Series)
Gel-Pak’s Large Substrate Vacuum Release Plates (VRLF, VRPLF Series) are ideal for securing wafers or large substrates ranging in size from 75mm to 450mm during shipping and handling.
The surface of the Large Substrate VR carrier uses a proprietary Gel or non-silicone Vertec™ film membrane over a mesh material to hold components in place until they are released by applying vacuum to the underside of the plate.
Ideal for:
- Full or partial wafers and substrates
- Applications where contact with top surface or edges must be avoided
- Diced wafers on film frames
- Handling thin, high value substrates such as fragile InP wafers, GaAs Wafers, AFM wafers, MEMs wafers
- Handling bare die.
- No contact with edges or top surface of device.
- Handling device sizes (X,Y) ranging from <250 micron to 75mm.
VRLF-100CT-00-X0
VRLF-200-16T-PLATE-XL
These are samples of VRLF/VRPLF Products. They are available in a variety of sizes and constructions. Please refer to VRLF/VRPLF Standard Part Number Catalogsfor options.
VRLF/VRPLF Plate Sizes | 4”x4”, 5” x 5”, 6” x 6”, 4” Round, 6” Round |
Device Size | Accommodates substrates (X,Y) from 75mm to 450mm |
Elastomer | Gel-Elastomer, Silicone-free ESD Vertec |
Product Construction | Plate with special process B Gel or non-silicone Vertec® film membrane over a mesh material with vacuum hole on underside of plate |
Box/Plate Configurations | Available in plate only with no box or variety of plate and hinged box material configurations |
Plate Materials | Acrylic (T) Phenolic (C) |
Box Materials | Clear Polystyrene (T) Black Conductive (C) |
Temperature Range | Phenolic Plate (C) up to 120˚C, Acrylic Plate (T) up to 70˚C |
Mesh Sizes | Standard 16. 33 Available on request. |
Prints/Grids | Wide assortment of prints, and grids available (see print options) |
Traditional Gel Tack Levels | ![]() |
Silicone-Free, ESD Vertec | ![]() |
*Contact factory for additional customization options.
Wafer/Large Substrate Plate Standard Product Catalog
Part Number | Description | Mesh Sizes Available | Tack Levels Available |
---|---|---|---|
VRLF-100-meshTT-Xn (Previously VR-925TT-00-Xn) |
Acrylic VR Plate (4" x 4" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-100-meshT-PLATE-Xn (Previously VR-925T-PLATE-Xn) |
Acrylic VR Plate (4" x 4" Active Area). Plate Only, No Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-100-meshCC-Xn (Previously VR-925CC-00-Xn) |
Phenolic VR Plate (4" x 4" Active Area) in Conductive Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-100-meshC-PLATE-Xn (Previously VR-925C-PLATE-Xn) |
Phenolic VR Plate (4" x 4" Active Area). Plate Only, No Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-100-meshCT-Xn (Previously VR-925CT-00-Xn) |
Phenolic VR Plate (4" x 4" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-125-meshTT-Xn (Previously VR-926TT-00-Xn) |
Acrylic VR Plate (5" x 5" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-125-meshT-PLATE-Xn (Previously VR-926T-PLATE-Xn) |
Acrylic VR Plate (5" x 5" Active Area). Plate Only, No Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-125-meshCC-Xn (Previously VR-926CC-00-Xn) |
Phenolic VR Plate (5" x 5" Active Area) in Conductive Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-125-meshC-PLATE-Xn (Previously VR-926C-PLATE-Xn) |
Phenolic VR Plate (5" x 5" Active Area). Plate Only, No Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-R150-meshTT-Xn (Previously VR-R927TT-00-Xn) |
Acrylic VR Plate (Round 6" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-R150-meshT-PLATE-Xn (Previously VR-R927T-PLATE-Xn) |
Acrylic VR Plate (Round 6" Active Area). Plate Only, No Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-R150-meshCT-Xn (Previously VR-R927CT-00-Xn) |
Phenolic VR Plate (Round 6" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-150-meshTT-Xn (Previously VR-927TT-00-Xn) |
Acrylic VR Plate (6" x 6" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-150-meshT-PLATE-Xn (Previously VR-927T-PLATE-Xn) |
Acrylic VR Plate (6" x 6" Active Area). Plate Only, No Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-150-meshCC-Xn (Previously VR-927CC-00-Xn) |
Phenolic VR Plate (6" x 6" Active Area) in Conductive Hinged Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-150-meshC-PLATE-Xn (Previously VR-927C-PLATE-Xn) |
Phenolic VR Plate (6" x 6" Active Area) Plate Only, No Box | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-R233-meshC-4HWS-Xn (Previously VR-9.2C/HWS-00-Xn) |
4 Round Phenolic VR Plates (Round 9.2" Active Area) | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-200-meshTT-Xn (Previously VR-200TT-00-Xn) |
Acrylic VR Plate in Transparent Box, Box and Plate size = 9" x 9", VR Active Area = 8" x 8" | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-200-meshT-PLATE-Xn (Previously VR-200T-PLATE-Xn) |
Acrylic VR Plate (8" x 8" Active Surface Area) | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-200-meshCT-Xn (Previously VR-200CT-00-Xn) |
Phenolic VR Plate in Transparent Box, Box and Plate Size = 9" x 9", VR Active Area = 8" x 8" | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-200-meshC-PLATE-Xn (Previously VR-200C-PLATE-Xn) |
Phenolic VR Plate (8" x 8" Active Surface Area) | 16 (33 mesh optional) | XT, XL/X0, X4 |
VRLF-R340-meshT-3PLATE-Xn (Previously VR-R300T-00-Xn) |
3 Acrylic VR Plates (Round 13.4" Active Area). Conductive box sold separately. | 16 (33 mesh optional) | XT, XL/X0, X4 |
Part Number | Description | Mesh Sizes Available | Tack Levels Available |
---|---|---|---|
VRPLF-100-meshTT-Xn (Previously VRP-925TT-00-Xn) |
Acrylic VR Plate (4" x 4" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-100-meshT-PLATE-Xn (Previously VRP-925T-PLATE-Xn) |
Acrylic VR Plate (4" x 4" Active Area). Plate Only, No Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-100-meshCC-Xn (Previously VRP-925CC-00-Xn) |
Phenolic VR Plate (4" x 4" Active Area) in Conductive Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-100-meshC-PLATE-Xn (Previously VRP-925C-PLATE-Xn) |
Phenolic VR Plate (4" x 4" Active Area). Plate Only, No Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-100-meshCT-Xn (Previously VRP-925CT-00-Xn) |
Phenolic VR Plate (4" x 4" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-125-meshTT-Xn (Previously VRP-926TT-00-Xn) |
Acrylic VR Plate (5" x 5" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-125-meshT-PLATE-Xn (Previously VRP-926T-PLATE-Xn) |
Acrylic VR Plate (5" x 5" Active Area). Plate Only, No Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-125-meshCC-Xn (Previously VRP-926CC-00-Xn) |
Phenolic VR Plate (5" x 5" Active Area) in Conductive Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-125-meshC-PLATE-Xn (Previously VRP-926C-PLATE-Xn) |
Phenolic VR Plate (5" x 5" Active Area). Plate Only, No Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-R150-meshTT-Xn (Previously VRP-R927TT-00-Xn) |
Acrylic VR Plate (Round 6" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-R150-meshT-PLATE-Xn (Previously VRP-R927T-PLATE-Xn) |
Acrylic VR Plate (Round 6" Active Area). Plate Only, No Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-R150-meshCT-Xn (Previously VRP-R927CT-00-Xn) |
Phenolic VR Plate (Round 6" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-150-meshTT-Xn (Previously VRP-927TT-00-Xn) |
Acrylic VR Plate (6" x 6" Active Area) in Transparent Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-150-meshT-PLATE-Xn (Previously VRP-927T-PLATE-Xn) |
Acrylic VR Plate (6" x 6" Active Area). Plate Only, No Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-150-meshCC-Xn (Previously VRP-927CC-00-Xn) |
Phenolic VR Plate (6" x 6" Active Area) in Conductive Hinged Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-150-meshC-PLATE-Xn (Previously VRP-927C-PLATE-Xn) |
Phenolic VR Plate (6" x 6" Active Area) Plate Only, No Box | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-R233-meshC-4HWS-Xn (Previously VRP-9.2C/HWS-00-Xn) |
4 Round Phenolic VR Plates (Round 9.2" Active Area) | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-200-meshTT-Xn (Previously VRP-200TT-00-Xn) |
Acrylic VR Plate in Transparent Box, Box and Plate size = 9" x 9", VR Active Area = 8" x 8" | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-200-meshT-PLATE-Xn (Previously VRP-200T-PLATE-Xn) |
Acrylic VR Plate (8" x 8" Active Surface Area) | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-200-meshCT-Xn (Previously VRP-200CT-00-Xn) |
Phenolic VR Plate in Transparent Box, Box and Plate Size = 9" x 9", VR Active Area = 8" x 8" | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-200-meshC-PLATE-Xn (Previously VRP-200C-PLATE-Xn) |
Phenolic VR Plate (8" x 8" Active Surface Area) | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
VRPLF-R340-meshT-3PLATE-Xn (Previously VRP-R300T-00-Xn) |
3 Acrylic VR Plates (Round 13.4" Active Area). Conductive box sold separately | 16 (33 mesh optional) | EH01, EH02, EH04, EH06 |
Quick Turn Wafer/Large Substrate Plates (VRLF/VRPLF Series) Parts
The following Wafer/Large Substrate Plates(VRLF/VRPLF) parts are available for purchase online in limited quantities with a 10-day lead time. For larger quantities, or for parts not listed below, please contact us for a quote.
Related Products:
A special VP-900 vacuum fixture is available for use with the VR-900 series vacuum plates products or the standard VHP-24 or VRS-24 vacuum fixtures can be used in combination with the VR-900 Template.