Wafer/Large Format VR Plates ☰ Quick Links × Quick Links E-Store Request Quote Request Sample Contact Technical Support Product Selection Wizard Calculate Number Of Devices/Carrier Gel-Pak Brochure Wafer/Large Substrate Vacuum Release Plates (VRLF, VRPLF Series) Gel-Pak’s Large Substrate Vacuum Release Plates (VRLF, VRPLF Series) are ideal for securing wafers or large substrates ranging in size from 75mm to 450mm during shipping and handling. The surface of the Large Substrate VR carrier uses a proprietary Gel or non-silicone Vertec™ film membrane over a mesh material to hold components in place until they are released by applying vacuum to the underside of the plate. Ideal for: Full or partial wafers and substrates Applications where contact with top surface or edges must be avoided Diced wafers on film frames Handling thin, high value substrates such as fragile InP wafers, GaAs Wafers, AFM wafers, MEMs wafers Handling bare die. No contact with edges or top surface of device. Handling device sizes (X,Y) ranging from <250 micron to 75mm. Request a Quote Request a Sample VRLF-100CT-00-X0 VRLF-200-16T-PLATE-XL These are samples of VRLF/VRPLF Products. They are available in a variety of sizes and constructions. Please refer to VRLF/VRPLF Standard Part Number Catalogsfor options. VRLF/VRPLF Details How Does it Work VRLF/VRPLF Applications Datasheets VR Accessories Resources VRLF/VRPLF Plate Sizes 4”x4”, 5” x 5”, 6” x 6”, 4” Round, 6” Round Device Size Accommodates substrates (X,Y) from 75mm to 450mm Elastomer Gel-Elastomer, Silicone-free ESD Vertec Product Construction Plate with special process B Gel or non-silicone Vertec® film membrane over a mesh material with vacuum hole on underside of plate Box/Plate Configurations Available in plate only with no box or variety of plate and hinged box material configurations Plate Materials Acrylic (T) Phenolic (C) Box Materials Clear Polystyrene (T) Black Conductive (C) Temperature Range Phenolic Plate (C) up to 120˚C, Acrylic Plate (T) up to 70˚C Mesh Sizes Standard 16. 33 Available on request. Prints/Grids Wide assortment of prints, and grids available (see print options) Traditional Gel Tack Levels Silicone-Free, ESD Vertec *Contact factory for additional customization options. Overview Vacuum Release technology relies on temporarily changing the surface contact area between the device and the VRLF/VRPLF plate elastic Gel or Vertec membrane placed over a mesh material. This change in surface contact directly affects the magnitude of the Gel holding force. In the normal “Hold Mode” (Figure 1), the surface contact is maximized and devices are held firmly in place for shipping, handling, and storage. In the temporary “Release Mode” (Figure 2), the surface contact is minimized by applying vacuum through a hole in the underside of the plate which causes the Gel membrane to conform to the shape of the mesh. This reduces the holding force between the Gel and device, which allows for easy device removal. Once vacuum is removed, the elastic Gel membrane returns back to its original position. The VRLF/VRPLF plates are reusable therefore this Hold and Release process can be done repeatedly on the same plate. Applying vacuum to the underside of plate is only required during the actual device unloading process. Vacuum is not used when loading devices on Gel surface. Mesh The correct Mesh size for a specific device is based on the device X,Y dimensions. Gel-Pak offers two different mesh geometries for its VRLF/VRPLF products: 16 and 33. Each mesh size number corresponds to the number of thread lines per linear inch. Gel-Pak’s Large Substrate Vacuum Release Plates are ideal for shipping and handling full or partial wafers ranging in size from 75mm to 450mm Wafers Partial wafers Large substrates InP Wafers GaAs Wafers GaN Wafers SiC Wafers AFM Wafers MEMs Wafers Diced Wafers on film frames Index #TD-003 DescriptionVR Tray Outgassing AvailabilityContact Factory Index #TD-004 DescriptionGel Composition (FT-IR) AvailabilityContact Factory Index #TD-005 DescriptionGEL Ionic Properties AvailabilityContact Factory Index #TD-006 DescriptionRoHS Data AvailabilityDownload Index #TD-007 DescriptionGEL Optical Properties AvailabilityDownload Index #TD-012 DescriptionGel 5-Year Aging Study AvailabilityDownload Index #TD-017 DescriptionESD Properties AvailabilityDownload Index #TD-018 DescriptionBox/Tray Material Temperature Properties AvailabilityContact Factory Index #TD-019 DescriptionInternal Clearnaces and Usable Areas AvailabilityDownload Index #TD-029 DescriptionREACH Test Report AvailabilityDownload Index #TD-039 DescriptionVertec Outgassing AvailabilityContact Factory Index #TD-041 DescriptionBiocompatibility test (Cytotoxicity) AvailabilityDownload Index #TD-047 Description Vertec TPE Product SDS AvailabilityContact Factory Index #TD-049 DescriptionStandard Gel Products SDS AvailabilityContact Factory Index #TD-051 DescriptionVertec_vs_Silicone FTIR AvailabilityContact Factory Index #TD-052 DescriptionVertec FTIR AvailabilityContact Factory Index #TD-060 DescriptionCleantape Datasheet AvailabilityDownload Index #TD-062 DescriptionVertec_PU_FTIR AvailabilityContact Factory Index #TD-063 DescriptionVertec Polyurethane Elastomer SDS AvailabilityContact Factory Index #TD-070 DescriptionVertec TPE Biocompatibility AvailabilityDownload Index #TD-071 DescriptionVertec PolyU Biocompatibility AvailabilityDownload Index #TD-081 Description Polyester Mesh_ SDS AvailabilityContact Factory Index #TD-082 Description Nylon Mesh_SDS AvailabilityContact Factory Index #TD-087 Description Vertec EH02 & EH04 Outgassing AvailabilityContact Factory Index #TD-089 Description VR/VRV/VRP Comparison AvailabilityDownload Index #TD-090 Description Polyurethane VR Tray AvailabilityDownload Index #TD-095 Description Elastomer Tack Chart AvailabilityDownload Index #TD-098 Description Vertec FK79 TPE Biocompatibility AvailabilityDownload Index #TD-102 DescriptionTD-102B GP TPU FILM SDS AvailabilityContact Factory Index #TD-116 DescriptionVertec-PU Long-Term Aging Study AvailabilityDownload Index #TD-128 DescriptionGP Cleantape SDS AvailabilityContact Factory Index #TD-132 DescriptionVertec FP64 Aging AvailabilityDownload Integrated Vacuum Station/Pick-up Tool (GP-TrayVac-A) The system uses customer supplied compressed air (60-80 psi at 0.5 SCFM) which generates a continuous vacuum to the underside of a Gel-Pak® VR tray to place it in release mode. The integrated system provides a special metal fixture plate for holding the VR tray along with a continuous vacuum pick-up tool which uses the same vacuum source. Separate on/off switches for the tray vacuum plate and the pick-up tool. The system comes with 9 individual vacuum tips for handling devices from 0.100" to 0.500" and 4ft of supply hose. The fixture can accommodate both 2" and 4" vacuum release trays. Vacuum Release Station The Vacuum Release Station product is ideal for low volume manufacturing and R&D applications. It is a manual hand pump that provides 25" Hg of static vacuum to the underside of a Gel-Pak VR tray to place it in release mode. The GP-VHP-24 includes the hand pump (VHP), tubing, and a special metal fixture plate (VP-24) for holding the VR tray. The fixture is designed for both 2" and 4" vacuum release trays. It can also accommodate Large Format VR products. The plate and hand pump can also be purchased separately. GP-PortaVac (GP-PortaVac) GP-PortaVac is a lightweight, low-cost, battery-operated vacuum pump system for unloading devices from Gel-Pak's VR trays. It is ideal for low volume manufacturing and R&D applications. Vacuum Hand Pump (GP-VHP-24) The Vacuum Release Station uses customer supplied continuous vacuum and applies it to the underside of a Gel-Pak VR tray to place it in release mode. The GP-VRS-24 includes an on/off valve box (VVB), tubing, and a special metal fixture plate (VP-24) for holding the VR tray. The fixture is designed for both 2" and 4" vacuum release trays. It can also accommodate Large Format VR products. The plate and valve box can be purchased separately. Wafer/Large Format VR Vacuum Plate (GP-VP-900) A special metal fixture plate designed to hold VR-925, VR-926, or VR-927 large format products while applying vacuum. The GP-VP-900 functionality is similar to a VP-24 plate but is designed for use with the larger VR products. Vacuum can be supplied to the GP-VP-900 using the same VVB or VHP products described above. Pen-Vac Vacuum Pickup Tool (GP-VPV) The Pen-Vac tool is ideal for manually offloading devices from Vacuum Release trays. The ESD-safe pickup tool is a self-contained unit and can lift up to 500 grams. It does not require hoses or batteries to operate. The Pen-Vac tool includes six tips with 1/8", 1/4" and 3/8" suction cups (one each of straight and angled shafts). Outer Clips for VR Tray with Lid (Required for -00B style) Part Number: GP-CLIP-22T 2" Natural Polypropylene Part Number: GP-CLIP-22C 2" Conductive Polypropylene Part Number: GP-CLIP-44T 4" Natural Polypropylene Part Number: GP-CLIP-44C 4" Conductive Polypropylene 2" Clip Pair for 5-Stack (5 Stacked 2"Trays with Single Lid) Part Number: GP-CLIP-22T/5 Natural Polypropylene 2" Clip Pair for 10-Stack (10 Stacked 2" Trays with Single Lid) Part Number: GP-CLIP-22T/10 Natural Polypropylene 4" Clip Pair for 6-Stack (6 Stacked 4" Trays with Single Lid) Part Number: GP-CLIP-44T/6 Natural Polypropylene Part Number: GP-CLIP-44C/6 Conductive Polypropylene How to use a Vacuum Release Tray Elastomer Technology Overview Product Selection Wizard Vacuum Release Tray User Guide Product Drawings Print Options Part Number Descriptions VR Tray Video Wafer/Large Substrate Plate Standard Product Catalog Wafer/Large Substrate Plates with Traditional Gel-Elastomer (VRLF) Xn = Gel Tack Level Parameter (XT, XL/X0,X4) Box Materials = Conductive (C) = Black, Antistatic (AS) = Tinted/Translucent, Transparent (T) – Clear Styrene Plate Materials = Conductive Phenolic (C), Transparent Acrylic (T) VRLF Products can be customized with a print or a grid Mesh 16 is standard, 33 optional Part Number Description Mesh Sizes Available Tack Levels Available VRLF-100-meshTT-Xn(Previously VR-925TT-00-Xn) Acrylic VR Plate (4" x 4" Active Area) in Transparent Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-100-meshT-PLATE-Xn(Previously VR-925T-PLATE-Xn) Acrylic VR Plate (4" x 4" Active Area). Plate Only, No Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-100-meshCC-Xn(Previously VR-925CC-00-Xn) Phenolic VR Plate (4" x 4" Active Area) in Conductive Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-100-meshC-PLATE-Xn(Previously VR-925C-PLATE-Xn) Phenolic VR Plate (4" x 4" Active Area). Plate Only, No Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-100-meshCT-Xn(Previously VR-925CT-00-Xn) Phenolic VR Plate (4" x 4" Active Area) in Transparent Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-125-meshTT-Xn(Previously VR-926TT-00-Xn) Acrylic VR Plate (5" x 5" Active Area) in Transparent Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-125-meshT-PLATE-Xn(Previously VR-926T-PLATE-Xn) Acrylic VR Plate (5" x 5" Active Area). Plate Only, No Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-125-meshCC-Xn(Previously VR-926CC-00-Xn) Phenolic VR Plate (5" x 5" Active Area) in Conductive Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-125-meshC-PLATE-Xn(Previously VR-926C-PLATE-Xn) Phenolic VR Plate (5" x 5" Active Area). Plate Only, No Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-R150-meshTT-Xn(Previously VR-R927TT-00-Xn) Acrylic VR Plate (Round 6" Active Area) in Transparent Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-R150-meshT-PLATE-Xn(Previously VR-R927T-PLATE-Xn) Acrylic VR Plate (Round 6" Active Area). Plate Only, No Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-R150-meshCT-Xn(Previously VR-R927CT-00-Xn) Phenolic VR Plate (Round 6" Active Area) in Transparent Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-150-meshTT-Xn(Previously VR-927TT-00-Xn) Acrylic VR Plate (6" x 6" Active Area) in Transparent Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-150-meshT-PLATE-Xn(Previously VR-927T-PLATE-Xn) Acrylic VR Plate (6" x 6" Active Area). Plate Only, No Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-150-meshCC-Xn(Previously VR-927CC-00-Xn) Phenolic VR Plate (6" x 6" Active Area) in Conductive Hinged Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-150-meshC-PLATE-Xn(Previously VR-927C-PLATE-Xn) Phenolic VR Plate (6" x 6" Active Area) Plate Only, No Box 16 (33 mesh optional) XT, XL/X0, X4 VRLF-R233-meshC-4HWS-Xn(Previously VR-9.2C/HWS-00-Xn) 4 Round Phenolic VR Plates (Round 9.2" Active Area) 16 (33 mesh optional) XT, XL/X0, X4 VRLF-200-meshTT-Xn(Previously VR-200TT-00-Xn) Acrylic VR Plate in Transparent Box, Box and Plate size = 9" x 9", VR Active Area = 8" x 8" 16 (33 mesh optional) XT, XL/X0, X4 VRLF-200-meshT-PLATE-Xn(Previously VR-200T-PLATE-Xn) Acrylic VR Plate (8" x 8" Active Surface Area) 16 (33 mesh optional) XT, XL/X0, X4 VRLF-200-meshCT-Xn(Previously VR-200CT-00-Xn) Phenolic VR Plate in Transparent Box, Box and Plate Size = 9" x 9", VR Active Area = 8" x 8" 16 (33 mesh optional) XT, XL/X0, X4 VRLF-200-meshC-PLATE-Xn(Previously VR-200C-PLATE-Xn) Phenolic VR Plate (8" x 8" Active Surface Area) 16 (33 mesh optional) XT, XL/X0, X4 VRLF-R340-meshT-3PLATE-Xn(Previously VR-R300T-00-Xn) 3 Acrylic VR Plates (Round 13.4" Active Area). Conductive box sold separately. 16 (33 mesh optional) XT, XL/X0, X4 Wafer/Large Substrate Plates with Vertec® Non-Silicone, ESD Elastomer (VRPLF) Xn = Gel Tack Level Parameter (EH01, EH02, EH04, EH06) Box Materials = Conductive (C) = Black, Antistatic (AS) = Tinted/Translucent, Transparent (T) – Clear Styrene Plate Materials = Conductive Phenolic (C), Transparent Acrylic (T) VRPLF Products can be customized with a print or a grid Mesh 16 is standard, 33 optional Part Number Description Mesh Sizes Available Tack Levels Available VRPLF-100-meshTT-Xn(Previously VRP-925TT-00-Xn) Acrylic VR Plate (4" x 4" Active Area) in Transparent Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-100-meshT-PLATE-Xn(Previously VRP-925T-PLATE-Xn) Acrylic VR Plate (4" x 4" Active Area). Plate Only, No Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-100-meshCC-Xn(Previously VRP-925CC-00-Xn) Phenolic VR Plate (4" x 4" Active Area) in Conductive Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-100-meshC-PLATE-Xn(Previously VRP-925C-PLATE-Xn) Phenolic VR Plate (4" x 4" Active Area). Plate Only, No Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-100-meshCT-Xn(Previously VRP-925CT-00-Xn) Phenolic VR Plate (4" x 4" Active Area) in Transparent Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-125-meshTT-Xn(Previously VRP-926TT-00-Xn) Acrylic VR Plate (5" x 5" Active Area) in Transparent Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-125-meshT-PLATE-Xn(Previously VRP-926T-PLATE-Xn) Acrylic VR Plate (5" x 5" Active Area). Plate Only, No Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-125-meshCC-Xn(Previously VRP-926CC-00-Xn) Phenolic VR Plate (5" x 5" Active Area) in Conductive Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-125-meshC-PLATE-Xn(Previously VRP-926C-PLATE-Xn) Phenolic VR Plate (5" x 5" Active Area). Plate Only, No Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-R150-meshTT-Xn(Previously VRP-R927TT-00-Xn) Acrylic VR Plate (Round 6" Active Area) in Transparent Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-R150-meshT-PLATE-Xn(Previously VRP-R927T-PLATE-Xn) Acrylic VR Plate (Round 6" Active Area). Plate Only, No Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-R150-meshCT-Xn(Previously VRP-R927CT-00-Xn) Phenolic VR Plate (Round 6" Active Area) in Transparent Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-150-meshTT-Xn(Previously VRP-927TT-00-Xn) Acrylic VR Plate (6" x 6" Active Area) in Transparent Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-150-meshT-PLATE-Xn(Previously VRP-927T-PLATE-Xn) Acrylic VR Plate (6" x 6" Active Area). Plate Only, No Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-150-meshCC-Xn(Previously VRP-927CC-00-Xn) Phenolic VR Plate (6" x 6" Active Area) in Conductive Hinged Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-150-meshC-PLATE-Xn(Previously VRP-927C-PLATE-Xn) Phenolic VR Plate (6" x 6" Active Area) Plate Only, No Box 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-R233-meshC-4HWS-Xn(Previously VRP-9.2C/HWS-00-Xn) 4 Round Phenolic VR Plates (Round 9.2" Active Area) 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-200-meshTT-Xn(Previously VRP-200TT-00-Xn) Acrylic VR Plate in Transparent Box, Box and Plate size = 9" x 9", VR Active Area = 8" x 8" 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-200-meshT-PLATE-Xn(Previously VRP-200T-PLATE-Xn) Acrylic VR Plate (8" x 8" Active Surface Area) 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-200-meshCT-Xn(Previously VRP-200CT-00-Xn) Phenolic VR Plate in Transparent Box, Box and Plate Size = 9" x 9", VR Active Area = 8" x 8" 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-200-meshC-PLATE-Xn(Previously VRP-200C-PLATE-Xn) Phenolic VR Plate (8" x 8" Active Surface Area) 16 (33 mesh optional) EH01, EH02, EH04, EH06 VRPLF-R340-meshT-3PLATE-Xn(Previously VRP-R300T-00-Xn) 3 Acrylic VR Plates (Round 13.4" Active Area). Conductive box sold separately 16 (33 mesh optional) EH01, EH02, EH04, EH06 Quick Turn Wafer/Large Substrate Plates (VRLF/VRPLF Series) Parts The following Wafer/Large Substrate Plates(VRLF/VRPLF) parts are available for purchase online in limited quantities with a 10-day lead time. For larger quantities, or for parts not listed below, please contact us for a quote. Showing 1 – 9 of 9 results Showing all 9 results Showing the single result No results found Sort by Price low to high Sort by Popularity Sort by Rating Sort by Price low to high Sort by Price high to low Sort by Newness Sort by Name A - Z Sort by Name Z - A Filters Sort results Reset Apply ImageDetails VRLF-100-16C-PLATE-XLDimensions:4" x 4" Active AreaMinimum Order Quantity:25Box Material:Phenolic VR Plate… $788.75 Max: 1 Min: 1 Step: 1 Add to cartVRLF-100-16T-PLATE-X0Dimensions:4" x 4" Active AreaMinimum Order Quantity:25Box Material:Transparent Acrylic VR… $788.75 Max: 1 Min: 1 Step: 1 Add to cartVRLF-150-16T-PLATE-XLDimensions:6" x 6" Active AreaMinimum Order Quantity:25Box Material:Transparent Gel-VR CarriersGel… $966.50 Max: 1 Min: 1 Step: 1 Add to cartVRLF-150-16C-PLATE-X4Dimensions:6" x 6" Active AreaMinimum Order Quantity:25Box Material:Conductive Gel-VR CarriersGel… $966.50 Max: 1 Min: 1 Step: 1 Add to cartVRLF-200-16T-PLATE-XLDimensions:8" x 8" Active AreaMinimum Order Quantity:10Box Material:Transparent Gel-VR CarriersGel… $1,332.50 Max: 1 Min: 1 Step: 1 Add to cartVRLF-150-16TT-X4Dimensions:6" x 6" Active AreaMinimum Order Quantity:25Box Material:Transparent Acrylic Vacuum… $1,768.50 Max: 1 Min: 1 Step: 1 Add to cartVRLF-150-16CC-X4Dimensions:6" x 6" Active AreaMinimum Order Quantity:25Box Material:ConductiveGel Tack Level:X4Formerly:VR-927CC-00-X4… $2,218.00 Max: 1 Min: 1 Step: 1 Add to cartVRLF-150-16CC-XLDimensions:6" x 6" Active AreaMinimum Order Quantity:25Box Material:Phenolic VR PlateGel… $2,218.00 Max: 1 Min: 1 Step: 1 Add to cartVRLF-200-16CC-XLDimensions:8" x 8" Active AreaMinimum Order Quantity:10Box Material:Phenolic VR PlateGel… $3,886.75 Max: 1 Min: 1 Step: 1 Add to cart Related Products: A special VP-900 vacuum fixture is available for use with the VR-900 series vacuum plates products or the standard VHP-24 or VRS-24 vacuum fixtures can be used in combination with the VR-900 Template. 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